Item type |
デフォルトアイテムタイプ_(フル)(1) |
公開日 |
2023-03-18 |
タイトル |
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タイトル |
Potentiality of Metal-Oxide-Semiconductor Silicon Optical Modulator Based on Free Carrier Absorption |
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言語 |
en |
作成者 |
Tabei, Tetsuo
Hirata, Tomoki
Kajikawa, Kenta
Sunami, Hideo
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アクセス権 |
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アクセス権 |
open access |
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アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
権利情報 |
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権利情報 |
Copyright (c) 2009 The Japan Society of Applied Physics |
主題 |
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主題Scheme |
NDC |
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主題 |
420 |
内容記述 |
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内容記述 |
Light propagation in a metal-oxide-semiconductor optical modulator based on free carrier absorption is analyzed theoretically. The analysis is based on Marcatili's approximation taking account of absorption by free carriers in the inversion layer The gate voltage and wavelength dependences of propagation loss and extinction ratio are also evaluated The free carrier absorption in the proposed modulator is appropriately confirmed by comparing theoretical results with the experimental results of fabricated optical modulators on silicon-on-insulator wafers, however, practical use of the device is limited since the extinction ratio remains small owing to a weak interaction between light and inversion carriers at 1.55-mu m-wavelength light. By theoretical analyses, a large extinction ratio is obtained for possible applications in the deeper infrared regime because free carrier absorption increases with wavelength. A much larger extinction ratio is expected when the interaction between guided waves and surface plasmons occurs. |
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言語 |
en |
出版者 |
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出版者 |
Japan Society Applied Physics |
言語 |
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言語 |
eng |
資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
出版タイプ |
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出版タイプ |
AO |
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出版タイプResource |
http://purl.org/coar/version/c_b1a7d7d4d402bcce |
関連情報 |
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識別子タイプ |
DOI |
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関連識別子 |
10.1143/JJAP.48.114501 |
関連情報 |
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識別子タイプ |
DOI |
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関連識別子 |
http://dx.doi.org/10.1143/JJAP.48.114501 |
収録物識別子 |
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収録物識別子タイプ |
ISSN |
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収録物識別子 |
0021-4922 |
収録物識別子 |
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収録物識別子タイプ |
NCID |
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収録物識別子 |
AA12295836 |
書誌情報 |
Japanese Journal of Appllied Physics
Japanese Journal of Appllied Physics
巻 48,
号 11,
発行日 2009
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旧ID |
29246 |