| Item type |
デフォルトアイテムタイプ_（フル）(1) |
| 公開日 |
2023-03-18 |
| タイトル |
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タイトル |
Monolithically integrated optical modulator based on polycrystalline Ba0.7Sr0.3TiO3 thin films |
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言語 |
en |
| 作成者 |
Xu, Zhimou
Suzuki, Masato
Tanushi, Yuichiro
Yokoyama, Shin
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| アクセス権 |
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アクセス権 |
open access |
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アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
| 権利情報 |
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権利情報 |
Copyright (c) 2006 American Institute of Physics. |
| 内容記述 |
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内容記述 |
Good-quality polycrystalline Ba0.7Sr0.3TiO3 (BST0.7) thin films were deposited on fused silica substrates and Si substrates having a thick amorphous SiO2 layer at a relatively low temperature of 550 °C by spin-coating metal organic solutions. The thin films were highly transparent to light in the ultraviolet to near-infrared wavelength regions. The optical propagation loss for a 5-μm-wide and 300-nm-thick polycrystalline waveguide based on BST0.7 was about 17 dB/cm at a wavelength of 632.8 nm. An electro-optic Mach-Zehnder interferometer modulator based on the polycrystalline BST0.7 thin film was monolithically integrated on a Si substrate with standard lithography and wet etching. Optical modulation was successfully demonstrated. The estimated electro-optic coefficient (6.7 pm/V) is the highest reported so far for this kind of film deposited on a fused silica substrate or a Si substrate with an amorphous SiO2 layer. |
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言語 |
en |
| 出版者 |
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出版者 |
American Institute of Physics |
| 言語 |
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言語 |
eng |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
| 出版タイプ |
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出版タイプ |
VoR |
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出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| 関連情報 |
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識別子タイプ |
DOI |
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関連識別子 |
10.1063/1.2197288 |
| 関連情報 |
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識別子タイプ |
DOI |
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関連識別子 |
http://dx.doi.org/10.1063/1.2197288 |
| 収録物識別子 |
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収録物識別子タイプ |
ISSN |
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収録物識別子 |
0003-6951 |
| 収録物識別子 |
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収録物識別子タイプ |
NCID |
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収録物識別子 |
AA00543431 |
| 書誌情報 |
Applied Physics Letters
Applied Physics Letters
巻 88,
号 17,
発行日 2006-04-17
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| 旧ID |
18592 |
ApplPhysLett_88_161107.pdf (327.3 KB)
