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Influence of bulk bias on negative bias temperature instability of p-channel metal-oxide-semiconductor field-effect transistors with ultrathin SiON gate dielectrics

https://hiroshima.repo.nii.ac.jp/records/2007196
https://hiroshima.repo.nii.ac.jp/records/2007196
fd2e9d0f-357a-44e3-86b6-2c826502e9af
名前 / ファイル ライセンス アクション
JApplPhys_99_064510.pdf JApplPhys_99_064510.pdf (214.4 KB)
Item type デフォルトアイテムタイプ_(フル)(1)
公開日 2023-03-18
タイトル
タイトル Influence of bulk bias on negative bias temperature instability of p-channel metal-oxide-semiconductor field-effect transistors with ultrathin SiON gate dielectrics
言語 en
作成者 Zhu, Shiyang

× Zhu, Shiyang

en Zhu, Shiyang

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Nakajima, Anri

× Nakajima, Anri

en Nakajima, Anri

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Ohashi, Takuo

× Ohashi, Takuo

en Ohashi, Takuo

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Miyake, Hideharu

× Miyake, Hideharu

en Miyake, Hideharu

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利情報
権利情報 Copyright (c) 2006 American Institute of Physics.
内容記述
内容記述 Bulk (well) bias effects (grounded, positively biased, and floating) on both static and dynamic negative bias temperature instability of p -channel metal-oxide-semiconductor field-effect transistors with ultrathin SiON gate dielectrics were systematically investigated. The device degradation under both static and dynamic negative bias temperature (NBT) stresses with relatively large gate voltage (Vg) is significantly enhanced by a positive bulk bias (Vb). Moreover, the device degradation under bipolar pulsed bias temperature (BT) stress is dramatically enhanced by floating the bulk electrode. Both phenomena can be attributed to an additional degradation related to hot hole injection. The holes are energized by an electrical field of the induced depletion region between channel and bulk provided by the positive Vb or, in the case of bipolar pulsed BT stress with the bulk electrode floating, by the transient depletion region below the channel induced by the p-n junction between source (drain) and bulk upon the gate voltage Vg being switched from positive to negative with a transition time less than about 0.2-100 ms.
言語 en
出版者
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
関連情報
識別子タイプ DOI
関連識別子 10.1063/1.2183409
関連情報
識別子タイプ DOI
関連識別子 http://dx.doi.org/10.1063/1.2183409
収録物識別子
収録物識別子タイプ ISSN
収録物識別子 0021-8979
収録物識別子
収録物識別子タイプ NCID
収録物識別子 AA00693547
書誌情報 Journal of Applied Physics
Journal of Applied Physics

巻 99, 号 6, 発行日 2006-05-15
旧ID 18602
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