Grain Growth Control by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation on Amorphous Silicon Strips and Its Application to High-Speed CMOS Circuit Fabrication

k6825_3

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k6825_3.pdf

https://hiroshima.repo.nii.ac.jp/record/2004486/files/k6825_3.pdf

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k6825_3.pdf (10.8 MB) sha256 613c6e9b455dbeb0b57c652d22c5a9c0296fffb2da93e5f59ccc5615277643a0

2023-03-18

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